Leak Valves

Automatic Variable Leak Valve ALV 01

Manual Variable Leak Valve MVLV 01

A range of leak valves - both automatic or manually driven provide assembling of gas inlet systems for realizing of various technological processes in a high vacuum conditions in the field of microelectronics, reactive sputtering, etc.

The automatic leak valves with microprocessor based controller ensures varios modes of operation and remote control of the reference point, including by using full duplex RS 232/RS 485 interface.