Planar Magnetron Cathodes

A range of planar magnetrons - circular and rectangular, both fully immersed in vacuum or for mounting through the wall opening are designed and manufactured. Microprocessor based power supplies provide reliable operation in the power stabilized or current stabilized modes and remote control of the reference point, including by using full duplex RS 232/RS 485 interface. There are provided memorizing of few process profiles, explored preferrably for deposition of multilayer coatings. MF pulsed DC mode of operation is available by request.

There were designed both fully immersed in vacuum and flange mounting through wall opening high vacuum solutions with indirect target cooling. 2" up to 8" target diameters are available, but we can provide any needed target diameter. It is possible due to using of sophisticated magnet array modelling software. Both balanced and unbalanced solutions are available. 30% to 50% target use depending on magnet array design and target thickness were achieved. Cathode bodies made of OFHC, SS 304L or Al alloy, PTFE insulators and neoprene caoutchouc seals were used. The working pressures are in the range 1.10-3 to 8.10-3mbar, but low pressure solutions can be provided with typical working pressure 8.10-4 mbar. It is possible to add gas injection possibilities.


There were designed both fully immersed in vacuum and flange mounting through wall opening high vacuum solutions with indirect target cooling. 8" up to 40" target lengths are available, but we can provide any needed target length. Target widths 3", 3.6", 4" and 5" are available, but we can provide any needed target width. It is possible due to using of sophisticated magnet array modeling software.
Both balanced and unbalanced solutions are available. 28% to 48% target use depending on magnet array design and target thickness were achieved. Cathode bodies made of OFHC, SS 304L or Al alloy, PTFE insulators and neoprene caoutchouc seals were used. The working pressures are in the range 1 to 8.10^-3mbar, but low pressure solutions can be provided with typical working pressure 8.10^-4 mbar. It is possible to add gas injection possibilities.

---

Parameter	8"cathode	10" cathode	16" cathode	20" cathode	40"cathode
Target dimensions, mm.	76 x 205	80 x 255	92 x 406	100 x 510	128 x 1016
Target thickness, mm.	2 to 6	2 to 8	2 to 10	2 to 10	2 to 12
Overall dimensions, mm.	106 x 235	110 x 285	124 x 440	132 x 544	164 x1052
Nom. water flow, l/min.	4.0	5.0	8.5	12.0	28.0
Water pressure, atm.	1 to 2	1 to 2	1 to 2	1 to 2	1 to 2
Max. Power density, W/cm2	25.0	22.0	22.0	22.0	20.0

↑ Back to top